Akrion Inc., a supplier of semiconductor surface preparation equipment, says its GAMA system has been qualified for an advanced solar cleaning application that was recently developed by a manufacturer of solar cells on a GAMA-automated wet station.
GAMA handles a wide variety of surface preparation applications on silicon wafers for IC devices and MEMS, photomasks and flat panel displays, as well as this newly developed process for solar manufacturers, the company says.
The modular GAMA batch-immersion platform is available in many configurations for varied etching, cleaning and stripping applications. The platform includes many Akrion innovations, such as megasonics, in situ processing, ICE-1 chemical concentration control, and ozonated DI water processing.
