Advanced Energy Industries Inc. has launched its Ascent DMS dual-magnetron sputtering product, which is designed for large-area solar module manufacturing and other applications.
Ascent DMS offers ‘repeatable, tunable film parameters’ and is designed to deliver 30 to 180 kW of bipolar power, with independent power control to each cathode, the company says. The product allows process engineers to customize the duty cycle to the wear profile of each target, enabling increased target-erosion uniformity and full utilization of each cathode.
Also, a controllable pulse rise feature offers advantages for producing more uniform and higher-density films, and options such as selectable frequency and independent power-ratio regulation for each magnetron help users fine-tune power, current or voltage.
‘The Ascent DMS technology is an exciting power-conversion advancement that further refines process control and productivity,’ says Yuval Wasserman, president of AE Thin Films. ‘Equally important for our customers, this technology offers significant long-term material savings, boosts yield and lengthens manufacturing uptime.’
