Busch, a manufacturer of vacuum pumps and vacuum systems, has launched the Cobra DS, a new range of dry screw vacuum pumps designed for several processes in the solar and semiconductor manufacturing industries.
All Cobra DS pumps are of a single-stage design, requiring fewer moving parts thanÂ multistage dry pumps. With fewer moving parts, service intervals are extended and nitrogen consumption is greatly reduced, according to the company.
With advanced onboard controls and diagnostics, the pump can be directly interfaced to the process tool. The compact universal interface unit also allows for the monitoring of operating parameters, including water flow, nitrogen flow, motor speed and motor current. Idle-mode capability ensures that pump speed is automatically controlled to match system load, further reducing power, water and nitrogen costs, Busch adds.