Celerity Inc., a manufacturer of precision instruments and gas and liquid delivery solutions for the global semiconductor, solar and electronics industries, has introduced its new GC100 series mass-flow controller (MFC) designed to precisely measure and control gases in multiple applications, including process gas control in solar cell manufacturing, glass- and web-coating, and plasma cleaning.
The GC100 series MFCs combine Celerity's digital MFC technology with stable measurement and control, packaged in a general-purpose MFC platform.
According to the company, the new controllers feature a number of key benefits, including high reliability, user-friendly configurability (which eliminates the need for individual gas and range calibrations, significantly reducing cost and complexity of inventory), and intelligent embedded diagnostics, service port and software for simple and efficient on-tool maintenance.
Celerity Inc: (408) 935-4500
SOURCE: Celerity Inc.