The Germany-based Institute for Solar Energy Research in Hamelin (ISFH) and Netherlands-based SoLayTec have achieved a conversion efficiency of 20.1% by applying a 5nm thin spatial atomic layer deposition (ALD) of aluminum oxide (Al2O3) on industrial-type passivated-emitter rear-contact (PERC) solar cells.
The spatial ALD process deposits the layer of Al2O3 as rear passivation on the cells. According to SoLayTec, the new technique shows PERC cells with efficiencies exceeding 20% can be made without a post deposition anneal process.
