M-Com Orders Veeco TurboDisc E450 MOCVD System


Millenium Communication Co. Ltd. (M-Com) has ordered a TurboDisc E450 arsenic phosphide (As/P) metal organic chemical vapor deposition (MOCVD) system from Veeco Instruments Inc. for the production of high-efficiency III-V compound multi-junction solar cells.

‘Our decision to add Veeco's E450 System to our fab was based on the tool's high throughput and ability to produce exceptional high-quality films, which we believe will translate into higher efficiency multi-junction solar cells,’ says Lih-Wen Laih, general manager of M-Com.

Veeco says its TurboDisc E450 (and its recently introduced successor, the E475) As/P tools are engineered for the high-volume production of compound semiconductor materials, and offer a high level of process control and reliability. With integrated RealTemp 200 technology for direct closed-loop in-situ wafer temperature control and fast gas switching for strict control of interface abruptness, these systems provide advanced material quality and process efficiency.

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