Germany-based Manz AG has developed a new tool for the wet-chemical processing of crystalline silicon solar cells.
The new IPSG CEI 4800 tool removes the highly doped layer from the back side and edges of a wafer, producing a chemical edge isolation. The remaining phosphor silicate glass layer on the front side of the wafer that was created during the previous diffusion process step is then removed.
‘With our new wet-chemical tool, we really close the gap in the PV processing chain previously uncovered by Manz,’ notes CEO Dieter Manz. ‘The newly developed soft sponge roller process concept enables faster in-line transportation speeds and ensures at the same time higher process stability combined with gentle wafer handling.’
The tool can reach throughput levels as high as 4,800 wafers per hour, according to Manz. The machine will be sold as a bundle with the Manz SpeedPicker for loading and unloading.