Metrology company Semilab has acquired Advanced Metrology Systems (AMS) and QC Solutions. The two Massachusetts-based metrology companies enhance Semilab's family of scalable, flexible solutions to help semiconductor and solar researchers and manufacturers characterize materials to reduce costs and increase yields, Semilab says.
‘With these acquisitions, we are expanding our ability to provide a full set of metrology solutions to support basic material characterization in everything from R&D settings to fully automated production lines,’ states Dr. Tibor Pavelka, one of the founders and president and CEO of Semilab. ‘Semilab receives the benefit of their technologies and intellectual property, and we can combine product lines to better meet the needs of our customers.’
AMS offers extendable, scalable metrology platforms and solutions for fast and detailed characterization of three-dimensional etched structures, including high-aspect-ratio contacts and trenches, metal film thickness on product wafers; and high-speed online mapping of low-k material properties.
QC Solutions offers patented, non-contact, non-destructive systems for the fast, accurate and repeatable measurement of the electrical properties of epitaxial and implanted silicon wafers. QC Solutions will also become part of Semilab AMS.