Tordivel Solar AS, based in Oslo, Norway, has released a new characterization instrument for the detection of cosmetic surface effects on silicon wafers. The instrument detects such defects as large-area contamination, small-area contamination, lines and spots, dark spots, suction-cup marks and shiny patches, the company says.
The system features a combination of angled lighting and omnidirectional uniform illumination, together with two-line scan cameras per side and a PC for image collection, processing, user interface and process interface software. The special lighting removes crystals in the image, making cosmetic defects clearly visible on the wafer image, Tordivel Solar says. The four-megapixel images are captured using line-scan cameras with an 80-micrometer resolution.Â
The system is sold as a stand-alone system or as part of the Tordivel Solar WIS (Wafer Inspection System). The characterization instrument is delivered as a one-sided or a two-sided version. The throughput is typically one wafer per second.
Tordivel Solar AS: 47 23158700
SOURCE: Tordivel Solar AS