Haverhill, Mass.-based Ultrasonic Systems Inc. (USI), a manufacturer of ultrasonic spray-coating equipment, has released the third generation of its PV360 for PV wafer-coating applications.
The PV360 uses USI's proprietary nozzle-less ultrasonic technology for highly uniform coating deposition that is thinner than conventional spray technologies, according to the company. Optimized for high-volume inline manufacturing, the PV360 can process up to 4,300 wafers per hour, the company adds.
The third generation of the PV360 features a wafer dryer system, dual-metering pump liquid delivery system and new control system with touch-panel interface. It delivers liquid coating with transfer efficiency of 95% to 99%, utilizing a traversing blade head for greater control of film thickness, down to the sub-micron level, USI says. It can handle the transfer of phosphoric/boric acid and phosphoric oxide dopants, as well as other proprietary coatings.
SOURCE: Ultrasonic Systems Inc.