Yokohama, Japan-based ULVAC-RIKO Inc., part of the ULVAC Group, has developed the MILA-700AR, a heating instrument for the heating of silicon wafers and other products.
The product, which includes an infrared gold image furnace, uses an air cooling system rather than a water cooling system, the company notes. Its maximum electricity consumption is 7 kW for heating and cooling. The system can display temperatures on a computer through USB connections, and a digital gas-flow meter is included as a standard feature.
The system is expected to become available next month.
